UAM6000-2 Photoresist Coater

UAM6000-2 Ultrasonic Photoresist Coating System is an industrial-grade spraying equipment, which can meet the production needs of small and medium batches. The more flexible design of this device makes it very suitable for photoresist and polyimide coating processes. Ultrasonic coating systems enable fine control of flow rate, coating speed, and deposition amount using simple layering techniques. Low velocity spray shaping defines the atomized spray into precise, controllable patterns, avoiding overspray while producing very thin, uniform layers.

Ultrasonic coating systems are able to coat onto both flat and 3D substrates commonly including silicon wafers, glass, ceramic, and metal. The wide application of this equipment is not limited to spraying on a photoresist, but can also be used in the energy industry, nano industry, microelectronics industry, semiconductor industry, glass coating industry, etc.