Furnace structure & Vacuum Chamber
 | - Dual Heater, two temperature controllers, two-channel gas flowmeters are integrated into a mobile aluminum alloy frame
- The chamber is made of high purity fused quartz tube
- Quartz tube size: 11" OD/10.8" ID x 9" H
- Carbon fiber felt as thermal insulation
- The vacuum flanges are made of Stainless Steel 316
- Overall dimension: 850(L)×745(W)×1615(H) mm
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Vacuum Flanges   | - Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily
- The bottom flange has one KFD-25 vacuum port with two gas inlets (1/4" pipe required) and needle valves
- The flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately)
- Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).
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Gas Flow Meters | Two float-meters are installed on the control panel with a measurement range of:
- 16 -160 mL/m
- 400 - 4000 mL/m (for purging purpose)
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Heater and Sample Holder
   | - Two shortwave IR lamps as heating elements for fast heating.
- The distance between two heaters is adjustable from 10 - 50 mm
- The heaters are made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling
- 3" round wafer holder is built-in with the top heater to load the substrate
- One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of the substrate to make it heated uniformly
- One 3" graphite plate can be used alternatively for the AIN plate, please click the picture below to order.
- Halogen Light Heater replacement is available at extra cost, please click here to order.
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| Temperature Controller | - Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters
- Each controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and the thermal couple broke
- PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below
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| Working Temperature | - Maximum temperature for each heater: <= 650ºC
- The maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:
- Spacing 30mm Max. temp difference: 315ºC @ heating bottom only
- Spacing 40mm Max. temp difference: 350ºC @ heating bottom only
- Spacing 50mm Max. temp difference: 395ºC @ heating bottom only
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| Heating & Cooling Rate | - Heating: < 8ºC/s ( heating single heater only )
- Cooling: < 10ºC/s (600 - 100ºC) Max.
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| Thermal Couple | Two K-type thermal couples (exposed) are installed on top and bottom heaters separately |
| Working Voltage | 208 - 240VAC, single-phase, 20A air breaker |
| Power Requirement | 2200W total ( 1100W for each heater ) |
| Optional | - One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump
- If you run corrosive gas, please consider to use anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost
- You may order a recirculating water chiller for saving water source separately
- You may choose digital MFC gas delivery system by clicking the first picture from the right below
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| Warranty | One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty) |
| Laptop, software & WiFi Control (Optional) | - Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available upon request at an extra cost (up to $1,000).
- Note: The software is only compatible with MTI’s Yudian Temperature Controller
 
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| Compliance | - CE Certified
- NRTL or CSA Certification is available upon request, additional charges will apply
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| Operation Video & Instructions |   |
Warning
 | - The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 mL/min) for reducing thermal shocks to the tube.
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
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| Reference Articles | |
