Pneumatic Viewport Shutters

Lesker - Pneumatic Viewport Shutters

Kurt J. Lesker Viewport Shutters Features:

• Prevent deposition materials from depositing on and ruining viewports
• Shutters are opened in safe conditions, closed while deposition occurs
• Operate to base pressures below 10^-9 Torr
• Bakeable to 250°C

Pneumatic Viewport Shutters Feature:

• Solenoid-operated spool valve switches compressed gas between actuator ports (energized to sweep, de-energized to return [not Included])
• Pneumatic actuator has adjustable stops for sweep adjustment
• Flow regulators are installed at each port to regulate air pressure
• Actuator assembly is easily removable with two cap screws for bakeout
• 98 psi maximum input air pressure

NOTE:

• Kurt J. Lesker / Premier Solutions strongly recommend shutters for evaporation and sputtering systems in which material may deposit on the viewport viewing area.
• The "E" dimension is applicable to only the pneumatic viewport shutters.

Dimensional Drawings

Premium Solutions Pte Ltd / Lesker Pneumatic Viewport Shutters