Planar Series Load Lock Assemblies

Kurt J. Lesker Company pre-engineered load lock system kits include our Planer Series quick-entry load lock vessel, available in 10"CF or 8"CF interface flanges. System kits include a manual or pneumatic isolation valve, rack-and-pinion transfer device, transfer forks and hardware pack.

Vacuum pumping includes a turbo molecular pumping with dry roughing pump connected via a stainless steel bellows. A wide-range vacuum gauge is read through the turbo controller

Lesker Planar Series Load Lock Assemblies