KJLC AT-Series

Lesker Complete packages ready to provide reliable plasma generation and RF biasing to meet your process requirements.

Features:

• CE marked compliance
• Automatic Gain Control
• Programmable Presets
• DC Probe Standard
• High Voltage Variable Capacitors
• Displays Forward Power, Reflected Power, and DC Bias
• Analog or Serial Interface
• Low Loss Design
• Single Point System Integration

NOTE: A DC Voltage probe is included within the Lesker AT Series Matching Networks. The probe provides a means to measure the developed DC Voltage within the chamber. The DC Voltage probe’s output signal is proportional to the developed DC within the chamber.