KJLC 909AR Series Ion Gauge

Lesker KJLC 909AR Series Ion Gauge

The Kurt J. Lesker new series features hot filament transducers with integrated electronics.

These hot filament sensors are Bayard-Alpert style, utilizing a fine wire collector at the center of a grid. Due to its small area, few x-rays hit the collector; therefore, the gauge can measure very low pressures. These transducers include two yttria-coated iridium filaments for reduced downtime. Yttria-coated iridium is resistant to damage caused by high oxygen partial pressures and exposure to atmosphere. The tube operates at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. The 909AR includes a screen to shield it from large particles.

Applications:

• Ideal measurement tools for high-vacuum applications, including pressure measurement of high-vacuum chambers and control or start-up of high-vacuum systems
• Measures base pressure and the pressure of back-filled gases
• Use in semiconductor processing and analytical systems

Features

• Wide measurement range of 10^-10 to 10^-2 Torr (mbar) for high-vacuum process monitoring
• Pressure-controlled e-beam degas for automated degas without filament shut down, patent pending
• Low-cost transducer alternative
• Compact design with integrated electronics and sensor in one unit
• Two-filament design for extended life
• Ease of operation with both analog and RS-232 digital communication
• Simultaneous pressure measurement during degas cycle
• Sensor portion of transducer can be replaced
• Process control set-point relay
• UHV-compatible materials used in sensor
• Reliable and repeatable pressure measurement for process stability
• CE marked, compliant with EMC Directive 89/336/EEC and Low Voltage Directive 73/23/EEC

Lesker KJLC 909AR Series Ion Gauge