| Furnace Structure | - Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- High purity fibrous alumina insulation for maximum energy saving.
- Split cover with Interlock protection, cut the power if lid open during furnace heating process.
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Power Input | 208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required) |
Heating Elements | - 8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm)
- Standard working life: 2000 hrs. ( depends on heating rate )
- The Halogen light tube is consumable. Please click picture left to order a spare one
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Heating Zone | 12" length with 4" constant temperature zone within +/-5ºC uniformity |
Working Temperature | - 1100ºC Max. for < 10 minutes
- 1000ºC Max. for < 20 minutes (Note: if running longer time, furnace case will > 100°C, must use fan to cool the furnace case from outside)
- 800ºC Max. for < 120 minutes
- 600ºC Max. for Continuous
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Max. Heating Rate | 50ºC/sec |
Cooling Rate | - Max. Cooling: 60ºC/min (Under vacuum: 200 m-torr), 117ºC/min (under atmospheric pressure)
- Lowest Cooling: 10 ºC / minute
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Thermocouple | K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath |
Temperature Controller
 | - FA-YD808P-AG temperature controller is included.
- Proportional–integral–derivative control (PID control) and auto-tune function
- 30 segments programmed with ramping, cooling and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- Default DB9 PC communication port
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Temperature controller (optional)
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Quartz Tube & Sample Holder | |
Vacuum Flange | - KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and a water-cooling jacket.
- It only requires water cooling in long-running times at temperatures > 600oC.
- Circulating water rate: 0.5 m3 /hr.
- The slide-out flange provides an easier way of loading, unloading the samples and other specific processes needed.
- Insert-able thermal-couple for accurate measurement.
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Vacuum Pump (optional)
 | - EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump.
- Click here to view other models of pump and package.
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Water Cooling (optional)
 | - Cooling water is required.
- Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
- We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.
- Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt.
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Flow-meter | One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min |
Vacuum Gauge | A digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace. |
Vacuum Pressure & Gas Fitting | - Pressure can reach 50 more by using a mechanical vacuum pump with KF25 adapter
- Pressure can reach 10-4 torr by the molecular pump with KF25 adapter
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Dimensions | - Flange closed: 1350mm(L) x 330mm(W) x 590mm(H)
- Flange opened: 1350mm(L) x 520mm(W) x 740mm(H)
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Net Weight | 70 kg (150 lbs) |
Warranty | One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control(Optional) | - Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipe, record, and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available at an extra cost (up to $1,000). Please contact us for more information.
- Note: The software is only compatible with MTI’s Yudian Temperature Controller
 
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Compliance | Please select the certificate in the options bar:
UL or CSA certificate (UL 61010) is available upon request at extra cost
 
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Optional | - You may combine the RTP furnace with a high vacuum station or gas livery system as a vacuum furnace or CVD system. Click pictures below to see details
- For achieving a fast cooling rate (< 10ºC/second), you may choose RTP furnace with sliding rail. Please click the picture below to see the details.
- You may order the pressure control module ( click picture below-right ) to keep the chamber at constant pressure
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Application Notes
 | - Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- This furnace also can be modified into an RTE, CSS or HPCVD furnace with a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY )
- After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.
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Operation Instructions | 
  
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