CALIBRATION SERVICES

Vistec Electron Beam - CALIBRATION SERVICES

Vistec Electron Beam GmbH operates a calibration laboratory, which has been accredited since July 1994 without interruption. The laboratory is labeled as DKD-K-12401.

The accreditation is given for the SI unit "Length"

Service description:
Measurement of positions and distances of both uni - and bidirectional edges on flat substrates (Chrome/Glass - masks)

Calibration of:

• line scales (stage micrometers)
• two dimensional calibration standards 
  (cross structur arrays, circle pattern arrays)
• center coordinate, diameter and roundness of chrome-circles
• grid orthogonality and angle between microstructurs
• line width of microstructures

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