Description
VTC-100ML-HC is an automated multi-layer spin-coating unit with a rotational speed of 10000 rpm and a heating cover up to 200℃. Integrated with two peristaltic pumps, it automates the cycles of spin-coating and drying process for two different solutions. With its modularized design, three or more channels of coating solutions can be simply added for layer-by-layer assembling.
Please note that the diagrams and product images are for illustrative purposes only. The final product may differ.
SPECIFICATIONS:
| Features | - Automated Spin-coating-drying-cooling process. One-click for multilayer programmable coating.
- Spinning Speed: 500 ~ 10000 RPM
- Substrate size: 10 mm to 4"
- Polypropylene Chamber with IR heating cover, up to 120ºC.
- Optional PTFE Chamber, up to 200ºC
- Two mini SS nozzles with IR heating cover with precision temperature controller up to 120ºC
- Two precision peristaltic pumps for solution dispensing with an increment of 9-10 μl
- Touchscreen panel for easy control and monitoring.
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| Power | - 110 VAC, single phase
- 2 kW
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Chamber and Cover
 
| - Chamber size: 150 mm diameter
- 2 sets of Aluminium vacuum chucks for substrates from Φ 25 - 100 mm.
- choice of material, PP or PTFE, for chamber and cover.
- IR heating cover with a single point PID temperature controller, up to 120ºC or 200ºC upon chamber material.
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Vacuum Pump
 | - One 120L/min Oilless Vacuum Pump is included
- For use in the Ar glove box, a feedthrough is required at an extra cost for a vacuum pump connection.
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| Peristaltic Pump | - Two peristaltic pumps with flow sensor
- High precision liquid dispenser with a minimum increment of 9-10 μl per injection.
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Nozzle
 | - Two mini SS nozzles to dispense the liquid
- Elevation lever to prevent dispensing liquid from drying
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| Cooling | - A 1/4" gas port for cooling gas connection
- An integrated solenoid valve for cooling gas on/off.
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Control Panel
 | - Touch screen control panel to program the process.
- Speed: 500 - 10000 RPM, 6 segments, 30 seconds max for each segment.
- Acceleration speed: 200-2000 RPM.
- Solution Injection Amount
- Dwelling time
- Heating rate, heating temperature, and dwell time
- Cooling air on/off, cooling temperature
- Number of coating for each solution up to 500 times of each solution
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| Automation | - The automated multilayer coating process is as follows,
- Wafer and solution preparation and loading
- Vacuum on
- Liquid dispensing solution A
- Spin-coating solution A
- Dwell
- Drying by the IR heating
- Cooling by the air
- Liquid dispensing solution B
- Spin-coating solution B
- Dwell
- Cooling by the air
- Repeat the cycle
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| Operation Video |  (video for heatable cover) |
Warranty &
Compliance | - One year limited with lifetime support
- CE Certified
- NRTL or CSA certification is available at an extra cost.
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| Warnings | - Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.
- Please turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
- For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
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| Shipping Dimensions | 40"(L) x 30"(W) x 30"(H) |
| Shipping Weight | 46 kg (100 lbs) |
