PVD Series Overview

PVD Series—Modular design configured to suit a variety of thin film deposition applications, typically for research and development or small batch production.

Leading medical device manufacturers use Kurt J. Lesker PVD line of systems to produce biocompatible films.

Typical Applications

• R&D Thin Film Deposition
• Small Batch Production

Deposition Techniques Available

• Magnetron Sputtering (RF, DC, or Pulsed DC)
• Electron Beam Evaporation
• Thermal Evaporation
• Organic Evaporation, Including OLED/PLED and Organic Electronics Applications

Process Options

• Heating
• Cooling
• Bias
• Ion Source for Substrate Cleaning/Assisted Deposition

Features

• D-shape 304 stainless steel chamber
• Aluminum door with large viewport
• Turbomolecular or cryogenic pumping
• Manual touch-screen or recipe-controlled PC based process automation
• Single, multiple, or custom substrate fixtures

Optional

• Planetary substrate fixture
• Load lock

Lesker PVD Series Overview