Description
Features
Machined from oxygen-free, high-conductivity copper.
- For regular, circular disc-type sputtering sources
- Most sputter sources, including our TORUS® 1, 2, 3 cathodes, accept a 0.125" (1/8") thick target bonded to a 0.125" thick backing plate
- For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250" (1/4") to suit most applications
NOTE:
- They are suitable for most circular target sources from other manufacturers, although they may need minor machining for screw, clamps, etc.
- Copper Cup Backing Plates available upon request.
Lesker OFHC Copper Backing Plates