Description
VBF-900X-S8 is a high vacuum furnace with an 8.6" ID x 13.4"L S310 stainless steel chamber, water cold flanges, and observation window, which can achieve a vacuum of 10-6 via Torr turbopump. It is designed for annealing semiconductor wafers (up to 8") under vacuum or inert gas atmospheres with a temperature up to 900°C.
SPECIFICATIONS
Power  | - Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
- 8 KW max.
- Note: Power cable included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab requirements
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Working Temperature | - <= 800°C continuously
- Max. 900°C, < 30 minutes
- Temperature Uniformity: +/- 2°C
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Heating Rate | - Max. 10°C/ min
- Recommended: 10°C/ min
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Heating Chamber
| - Two heating Modules via High-quality Ni-Cr-Al resistance wire for better temperature uniformity
- S310 refractory stainless steel chamber with the dimension of 9" O.D. x 8.6" I.D x 23" H
- Water cold vacuum-sealed flange with KF25 Vac. port with valve and gas inlet &outlet valves (Pic.1)
- Quartz thermal block is included
- Mechanical vacuum gauge is built-in
- Vacuum level: 10-6 torr by turbopump and 10-3 by rotary pump ( Click Pic. 2- 4 to order the pump )
 Pic. 1  Pic. 2  Pic. 3  Pic. 4 |
Temperature Controller   | - Two programmable temperature controllers are included
- Programmed with ramping, cooling, and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- THE Default DB9 PC communication port and software are included for PC operation.
- Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy
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Options | - A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C. 16L/min water flow required. Please click the picture below left to order the water chiller (Pic. 1)
- Digital Pressure vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. (Click Pic. 2 to order)
- You may choose a gas mixer to deliver multiple gasses with precision flow rate control (click Pic. 3)
- This furnace can be modified to a verticle hydrogen furnace at an extra cost. (Pic. 4)
 Pic. 1 Pic. 2 Pic. 3  Pic. 4 |
Overall Dimensions |  (click picture to see details)
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Net Weight | 100 kg |
Shipping Weight | 250 lbs |
Shipping Volume | 45"(L) x 28"(W) x 35"(H) |
Warranty
| - One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.
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Compliance
| - CE Certified
- NRTL or CSA certification is available upon request at extra cost.
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Warning 
Click here to learn the installation of a gas regulator
| - Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum.
- The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks
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Operation Demo Video | 
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