Super-SPECTROS 200

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Description

     

 

Features

  • 24" wide x 24" deep x 40" high rectangular box chamber
  • Large sliding O-ring sealed front door with glove box interface flange
  • Large lading O-ring sealed rear door with glove box interface flange
  • Available with up to 14 low-temperature organic material evaporation sources
  • Available with up to 4 metal evaporation sources
  • Up to 8" x 8" (200mm x 200mm) substrates
  • Turbo molecular or cryogenic pumping
  • Fully computer-controlled process automation
  • CE Approved

Optional

  • Glove box with gas purification system
  • Substrate heating to 200°C
  • Automated mask changing
  • Wedge shaped film growth tool
  • Aluminum pellet feeder

 

Lesker Super-SPECTROS 200

 

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