Mini-SPECTROS

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Description

 

Mini SPECTROS Features

  • Substrate size up to 100x100 mm or 150 mm diameter
  • Up to 4 off thermal sources
  • Up to 4 off 10cc or 1cc Organic Source, plug-in, low temperature sources
  • Optional 2 off 2" Magnetron sources in place of Organic Sources
  • Hinged rear door for maintenance
  • 520 l/sec (or 210 l/s) Turbomolecular pump
  • Scroll type 10m3 /hour roughing pump
  • Maximum of 6 film thickness monitors for deposition control
  • Pump down time to 5x10-6 mbar is 30 mins with 685 l/sec turbomolecular pump
  • Optional Heating to 150 °C or 350 °C or Optional Heating and Cooling between -10 °C and + 80 °C

 

Lesker Mini-SPECTROS

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