Physical Vapor Deposition Systems (PVD)

Rapid Thermal Processing / Annealing / Rapid Thermal Chemical Vapor Deposition (RTP/RTA/RTCVD)

Rapid Thermal Processing / Annealing / Rapid Thermal Chemical Vapor Deposition (RTP/RTA/RTCVD)

AS MICRO

3-inch RTP system for laboratories.  Dual chamber version for cross contamination issues

 

说明: ASMicro_01_detouree_Fond1

 

 

AS-ONE

Rapid Thermal Processing Cold Wall Chamber Furnaces for 100mm and 150mm Version

 

说明: ASOne_FS_01

 

 

AS-Master

200mm Versatile RTP system, RTCVD capability (option), From RT to 1500°C down to 10-6 Torr.

 

 

 

 

 

 

Premier Solutions Pte Ltd / ANNEALSYS – Rapid Thermal Processing / Annealing / Rapid Thermal Chemical Vapor Deposition (RTP/RTA/RTCVD)

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