Rectangular Valve - Dual Housing

Applications

• Plasma Etch, CVD, Sputter Deposition
• Manufacturing of solar panels
• Semiconductor processing
• LCD/flat panel processes
• All other cluster vacuum systems

Features

• Semi standard application (Semi E21-94, Semi E24-92, Semi E21.1-1296)
• Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
• Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
• Mechanical locking so at the end of gate travel the valve locks into position
• Welded bellows actuator seal
• Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
• Double rectangular housing to allow product to enter one side and exit the other

Options

• Custom sizes available
• Various o-ring compounds (Kalrez®, Chemraz®, etc.)

Lesker Rectangular Valve - Dual Housing