Quadratic Distribution Vessel - QDR 450

Applications

• The Lesker QDV 450 facilitates multi-chamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
• The Lesker QDV 450 can also function as an entry lock

Features

• All aluminium vessel construction
• Stand alone framework
• Turbo-molecular pumping
• Accommodates up to 6" (150 mm) diameter substrates
• Motorized rotary/linear substrate slide mechanism with precision guide way system
• MESC-SEMI rectangular ports
• User select semi-automation

Options:

• External dedicated load lock chamber
• External single or multi wafer storage

Lesker Quadratic Distribution Vessel - QDR 450