Single Zone Tube Furnace with High Vacuum (1E-5 torr) and Precision Gas Flow Station (2-4 chs optional) for CVD - OTF-1200X-HVC series

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Item Number: OTF-1200X-HVC


The OTF-1200X-HVC series furnace workstation consists of a OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.


OTF-1200X series tube furnace Casing Double layer steel casing with air cooling.
Built in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube Material: Fused quartz tube
One processing tube is included with the furnace. 
Please select the tube size in the option bar to update the price.
Power 2.5KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temp. Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate  Heat-up rate: 1~20°C/min programmable
Heating Zone Length Total heating zone: 440mm
Constant Temp. Zone: 150mm (±1°C)
Temp. Control PID automatic control with 30 steps programmable segments.
Temperature accuracy: ±1°C
Thermocouple: K type built inside the furnace
Vacuum Seal One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves 
- one KF-40 connector for the high vacuum station.
Power 100~110W
Rated Voltage AC 208-240V Single Phase, 50/60Hz
High Vacuum Station Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Volume Flow Rate Nitrogen   N2     33 L/s
Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Mass Flow Gas Control Structure Made of 316 stainless steel
Gas mixing tank: Φ80X120mm  
Dimension: 600(L) x 600(W) x 700(H), mm
Power 18W
Rated Voltage AC 208-240V, Single phase, 50/60Hz
Gas routes Please select the number of gas routes in the option bar to update the price
Warning The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
Operation Instructions




Premier Solutions Pte Ltd / MTI Corporation - Single Zone Tube Furnace with High Vacuum (1E-5 torr) and Precision Gas Flow Station (2-4 chs optional) for CVD - OTF-1200X-HVC series

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