XTC/3M Single Layer Deposition Controller

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Description

 

Advanced quartz crystal deposition controller for multiple sequential depositions.

The Lesker XTC/3M quartz crystal deposition controller is a multiple layer closed-loop controller for sequentially depositing layers from multiple materials, sources, and crucibles. This controller is intended for those applications where the entire process recipe resides in the thin film controller.

Features

  • TFT color LCD with graphics
  • Membrane keypad
  • 32 programmable films
  • 99 processes
  • 999 layers per process
  • 2 sensor measurement channels
  • 2 source control channels
  • 8/12 event selectable I/O circuitry
  • RS-232 computer communications
  • Interface connectors
  • Operations manual on CD-ROM
  • Patented Modelock Measurement System

Options

  • Ethernet computer communications
  • Handheld power controller for manual operation
  • Rack mount kit for 1 or 2 units

XTC/3M Single Layer Deposition Controller

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