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Kemstream - VAPBOX 500

New DLI Vaporizer


High Performance, Precise, Innovative liquid and solid precursors  Delivery and Vaporization System for ALD, CVD, MOCVD,  PECVD and all gas phase processes.  The VAPBOX 500 vaporizes pure  liquid compounds and  solid ones dissolved in a carrier liquid (organic solvent).  The VAPBOX 500 is able to handle and vaporize most of solid and liquid compounds including  low vapor pressure, thermally labile and viscous ones.  

The  VAPBOX 500 provides  unmatched performances based on a very fine atomization of a pulsed liquid mixed with a carrier gas prior to injection inside the vaporizer. The generated vapors can be used for the synthesis by ALD and CVD of thin films, nanoparticles and nanoobjects of numerous functionnal materials such as for instance : dielectrics (low-k and high-k), barrier layers (Ta, Ti and Nb nitrides), ferroelectrics, piezoelectrics, metals (Cu, Pt, Ru, Ir, Rh, Ag, Pd,…), IIIV, II-V,  chalcogenides, transparent conductive oxides, photovoltaïcs, low friction coatings, hard coatings and superconductors.

Because of its unique proprietary way to deliver and atomize the liquid inside the vaporizer the VAPBOX 500 is able to achieve a  real non-contact flash vaporization therefore generating particle free vapors.  Indeed, the blasting of the carrier gas/liquid mixture inside the vaporizer allows generating an aerosol of around 10 microns diameter droplets.  Such very small droplets can be easily flash vaporized. Competitors’ vaporizers are generating bigger liquid droplets that cannot be flash vaporized and clogg the vaporizer.  The  VAPBOX 500 operates from vacuum to atmospheric pressure.  Thanks to delivering of accurate and stable liquid flows, the  VAPBOX 500 delivers accurate and stable vapor flows.



Premier Solutions Pte Ltd / Kemstream - VAPBOX 500 (Vaporizer)

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