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Kemstream - VAPBOX 4000

DLI (Direct Liquid Injection) CVD/ALD vaporizer - For very high vapor flows


Thermal Performances

3 heating zones for a better temperature uniformity and 3 thermocouples


250°C max



Vapors outlet: 1/2" VCR M

Liquid inlets: swagelok 1/8" (recommended), 1/8" VCR F also available

Carrier gas inlets: 1/4" VCR F (standard), M also available


Size and weight

Weight: 30kg

Vaporization chamber volume: 4000cm3


Four Injection Heads saves space and provides process flexibility

One vaporizer can handle four liquids, saving space

Sequential delivery of 4 independent vapor mixtures for multi-layer deposition (heterostructures, nanolaminates,…)

Simultaneous vaporization of 4 solutions that react together in the liquid state but not in the vapor state for multi-metallic 



Premier Solutions Pte Ltd / Kemstream - VAPBOX 4000 (Vaporizer)

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