UL Standard 1200°C Compact Split Tube Furnace with Vacuum Flanges & Optional 1", 2", 2.36" Tube - OTF-1200X-S-UL

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Product Number: OTF-1200X-4-SF

OTF-1200X-4-SF is a compact 4" ID quartz tube furnace with slideable flange with 1200°C Max. working temperature, which is designed for customers to build a DIY CVD system easily. 



Furnace Structure
Rated Voltage Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)
Power Consumption Max. 3600 W (20 A breaker required)
Heating Zone
  • Heating zone length:  440 mm
  • Constant temperature zone: 100 mm 
Working Temperature
  • Max heating temperature: 1200°C ( < 30 minutes )
  • Continuous working temperature: 200~1100°C
  • Max heating & cooling rate: 20°C/min
Temperature Control
  • Digital controller with PID/self-tuning function and 30 segments programmable
  • Thermocouple: K type thermocouple, which is inserted from the right side flange and connected to temperature controller.
  • Control accuracy: +/- 1°C
  • Software for PC control furnace is available as optional
  • The new version of PC module is now compatible with Lab View 05/08/2014
Vacuum and Gas Sealing & Flange
  • Right flange:
    • Water cooling structure with 12mm quick connector to prevent sealing o-ring from melting (water cooler is not included)
    • KF25 vacuum fitting (to vacuum pump, to order pump,  vacuum hose, valve and sealing gasket)
    • Slidable for customer to easily and fast push/pull in/out sample
    • One quartz wafer holder ( 3"dia. max.  ) is built in the flange with heating radiation block for CVD growth on thin substrate
    • An anti-corrosive capacitance diaphragm gauge is included
  • Left flange with four 1/8'' Swagelok fittings for 1/8'' gas tube:
    • Two separate 1/8'' fitting on the flange for any gas into the CVD furnace 
    •  and customized feedthrough is available upon request.
Net weight 100kg
  • Standard:    48"L X 18"W X 23"H
  • Maximum:   66"L X 18"W X 32"H  (Lid open and right-side flange slided out)
  • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)
  • You may order replacment quartz tube: EQ-QZTube-RTP
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra cost. 
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure <0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Please click here to learn how to install the gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions
Application Notes You may add a scabable below on sliding flange at additional cost to achieve fast heating and cooling under controlled atmosphere or vacuum.  Also you can add electric motor driven flange at extra cost similar to the furnace below-right.




PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - UL Standard 1200°C Compact Split Tube Furnace with Vacuum Flanges & Optional 1", 2", 2.36" Tube - OTF-1200X-S-UL

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