UL-Standard 1100°C 7.6 Liter Hi-Vacuum Chamber Furnace (UL/CSA ready to pass) - VBF-1200X-H8-UL

0.0/5 rating (0 votes)

Description

 

Part Number: VBF-1200X-H8-UL

 

VBF-1200X-H8 is a UL/CSA certificateable vacuum furnace.  It equips a 7.5" ID x 13.4"L quartz tube chamber sitting horizontally.  Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 torr through a mechanical or molecular vacuum pump.  It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C.  It also can also be used as vacuum brazing furnace for fusing small parts.

 

SPECIFICATIONS

Power 3 KW max. 
Voltage Single phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
Note: Power cable included , but without plug. Please install a plug by your own or click link below picture to choose a plug according to your country or your lab requriement
Working Temperature
  • <= 1000 °C continuously

  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C
Heating Rate
  • Max. 20°C/ min
  • Recommended. 10°C/ min
Heating Elements     High quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200°C.

Quartz Tube Size & Effective Heating Area   

   

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L. 

  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)

  • Uniform Temperature zone:  4"dia x 3.5" depth in center position within +/- 5ºC

  • Quartz tube is replaceable  

Vacuum Flange 
  • Stainless steel vacuum flange with dual high temperature silicone O-rings at front door.
  • One needle valve is built into the flange for use as gas inlet.
  • One KF25D port on left side of furnace for connection to vacuum pump.
  • A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 300°C. The inlet and outlet ports located on the left side of furnace are used for connecting to a water chiller through two 12 mm dia. polyurethane tubes (water chiller is sold separately). 
  • A Quartz Thermal Block (filled with fibrous alumina) is included to prevent heat radiation and dissipation. It also provides excellent vacuuming while ensuring a clean environment inside the chamber.
  • Optional: If using the furnace for flat samples, a flat sample holder (pictured left-bottom) can be ordered.
                   click here to choose a crucible
Pressure Measurement / Monitoring Mechanical Vacuum Gauge (included as standard accessory), which measures within a pressure range of -0.1 to 0.15Mpa.                                                  
Digital Pressure Gauge (optional)
A gas-type indenpendent (above 10mbar) digital vacuum gauge with wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces risks of chamber explosions caused by incorrect reading of gas pressures due to gas-type dependency. 
                                    
Vacuum Pressure
  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials etc.  By using KFD25, stainless steel pipe, MTI's two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10 mtorr (10-2 torr)via mechanical pump within 30 minutes withoutThermal Block
    • 60 mtor(6x10-2 torr ) via mechanical pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optionals: 
                            
Temperature Controller
  • PID automatic control and auto-tune function.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communication Port.
  • Optional:  
  • The furnace may be operated by PC . Please order a MTS-02 control module at extra cost.
  • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems. For more information please click here.
                        

Gas Purging Inlet

  • One gas purging inlet (1/4" house adapter ) with a valve is on the left side of furnace (click the pic in left colunm).
  • Inert gas can be introduced into the chamber via the inlet for purging purpose. 
  • If continous gas flow is needed, refer to the addtional gas inlet and thermocouple probe below.
(Attention: MTI does not recommend using its products under hazardous conditions. We will not be liable for any damages incurred under hazardous conditions. Tube furnaces with quartz tubes are designed for use under vacuum condition and at low pressure levels <  0.2 bar  ( 3 PSI ). )
Gas Mixing System (optional) You may choose a gas mixer to deliver multiple gases with control over gas composition and flow-rate (click pictures below to order separately).
New Version front panel
Optional Gas Inlet and thermocouple feedthrough
  • Optional multi-functional flange cap is available at extra cost, which includes:
    • one 1/4 gas inlet which allows continous gas delivery during operation. A gas quartz tube (6.35mm O.D) is provided to reach the location of the sample and deliver reactive gas to sample directly. 
    • one 1/4 theroucople feedthrough port which allows a 1/4 O.D thermocouple proble to be inserted into the chamber and measure temperature of sample independently
    • Four probes electric resistance measurement feadthrough also is available upon request.
    • One bored Al2O3 foam refractory block is provided.
    • Click pictures below to review detail structure.
                              
Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)

          

Net Weight 80 kg
Shipping Weight 200 lbs
Shipping Volume 45"(L) x28"(W) x35"(H) 
Warranty
  • One year limited warranty with life time support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty.
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 
                  

Warning  


Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for use under vacuum condition and at low pressure levels <  0.2 bar  ( 3 PSI ). 
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforseeable damages..
  • A maximum temperature of 1000°C should be imposed on all quartz tube furnaces while running vacuum to ensure a safe operation. Temperatures beyond 1000°C could cause the quartz tubes to undergo deformations under vacuum.
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min ) for reducing thermal shocks to the tube ( with the output pressure of the gas tank regulated  to < 0.2 Bar or < 3 PSI ).
Demo video

 

 

 

PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - UL-Standard 1100°C 7.6 Liter Hi-Vacuum Chamber Furnace (UL/CSA ready to pass) - VBF-1200X-H8-UL

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818