Two Zones Furnace for PVD (CSS) Processing - OTF-1200X-RTP-II

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Description

Item Number: OTF-1200X-RTP-II

OTF-1200X-RTP-II is a double heating zone rapid thermal processing vertical tube furnace with 11" I.D. processing quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC.

SPECIFICATIONS:

Furnace structure & Vacuum Chamber
  • Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame
  • The chamber is made of high purity fused quartz tube
  • Quartz tube size: 11" OD/10.8" ID x 9" H
  • The vacuum flanges are made of Stainless Steel 316





Vacuum Flanges
 
  • Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily
  • Bottom flange has one KFD-25 vacuum port with right-angle valve and two gas inlets (1/4" pipe required) with needle valves
  • Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump (vacuum pump is not included, please order separately)
  • One digital vacuum gauge is installed on the top flange
Gas Flow Meters
Two float-meters are installed on the control panel with measurement range of:
  • 16 -160 mL/m
  • 400 - 4000 mL/m (for purging purpose)





Heater and Sample Holder
  • Two shortwave IR lamps as heating elements
  • The distance between two heaters is adjustable from 10 - 50 mm
  • The heaters are installed in the water cold jacket to reduce heat radiation and allow for fast cooling
  • Water cold jacket is made of SS316 with PTFE fitting
  • 3" round wafer holder is built in with top heater to load substrate
  • One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of substrate to make it heated uniformly
  • One 3" graphite crucible can be put on the bottom heater to load evaporating materials





Temperature Controller
  • Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters
  • Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken
  • PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below


Working Temperature
  • Max. temperature for each heaters: <= 650ºC
  • Max. temperature difference between two heaters: <= 300ºC depends on spacing between two heaters:
    • Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only
    • Spacing 40mm       Max. temp difference:  350ºC @ heating bottom only
    • Spacing 50mm       Max. temp difference:  395ºC @ heating bottom only
Heating & Cooling Rate
  • Heating: > 8ºC/s ( heating single heater only )
  • Cooling: > 10ºC/s (600 - 100ºC) Max.
Thermal Couple Two K-type thermal couples are installed on top and bottom heaters separately
Working Voltage 208 - 240VAC, single phase, 20A air breaker
Power Requirement 2200W total ( 1100W for each heater )




Optional
  • One vacuum pump is required. Please order separately by click the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump
  • If you run corrosive gas, please consider to use anti-corrosive dry pump is shown in the second picture from the left below (EQ-DP250) at extra cost
  • You may order a recirculating water chiller for saving water source separately
  • You may choose digital MFC gas deliver system by click the first picture from the right below
Warranty One year limited with life time support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
Application notes Please read article: High efficiency  CSS CdTe Solar Cell
Operation Instructions

Warning The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)

 

 

 

Premier Solutions Pte Ltd / MTI Corporations - Two Zones Furnace for PVD (CSS) Processing - OTF-1200X-RTP-II

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