Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-5 torr) + MFC Gas Station (2-4 chs optional) for CVD - OTF-1200X-III-HVC series

0.0/5 rating (0 votes)


Item Number: OTF-1200X-4-III-HVC4


The OTF-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.


OTF-1200X-III series tube furnace Casing Double layer steel casing with air cooling.
Built in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube Material: Fused quartz tube
One processing tube is included with the furnace. 
Please select the tube size in the option bar to update the price.
Power 2.5KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temp. Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate  Heat-up rate: 1~20°C/min programmable
Heating Zone Length Total heating zone: 880mm   (220mm + 440mm + 220mm)
Temp. Controller
  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace
Vacuum Seal One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves 
- one KF-40 connector for the high vacuum station.
Power 100~110W
Rated Voltage AC 208-240V Single Phase, 50/60Hz
Dimension 1100(L) x 450(W) x 670(H), mm
High Vacuum Station Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Volume Flow Rate Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Mass Flow Gas Control Structure Made of 316 stainless steel
Gas mixing tank: Φ80X120mm  
Dimension: 600(L) x 600(W) x 700(H), mm
Power 18W
Rated Voltage AC 208-240V, Single phase, 50/60Hz
Gas routes Please select the number of gas routes in the option bar to update the price

Shipping & Warraty

Net weight 100Kg
Warranty One year limited warranty 
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, 
please order the replacement at related products below.)
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
Notes - Please click here to see our typical temperature profile calibration result at various temperature.
- In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by yourselves. Please click here to learn how.
How to set up ceramic tube and vacuum flange for MTI Tube furnace.
Warning The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
Operation Instructions




Premier Solutions Pte Ltd / MTI Corporation - Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-5 torr) + MFC Gas Station (2-4 chs optional) for CVD - OTF-1200X-III-HVC series

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818