Three Zone Split Tube Furnace (5" Dia, up to 1200C) with Sliding Rail, 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Gauge - OTF-1200X-5-III-SF

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Item Number: OTF-1200X-5-III-SF


OTF1200X-5-III-F3LV is a CE certified splitable 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a thermal gradient by adjusting temperature of three zones. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.


Furnace structure

  • Double layer steel case with two cooling fans to ensures low surface temperature.
  • Energy saving high purity fibrous alumina insulation.
  • One flange is supported by sliding rail to make sample loading /unloading easy; another seal flange is installed with a digital vacuum gauge.

Power Consumption

7 KW Max (power cord is included without plug)

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz (Please select the right pump in the option bar based on your working requirement) (40A breaker required)

Maximum Temperature

1200 oC

Continuous Temperature

1100 oC

Max. Heating Rate

<= 20 oC /min

Heating Zone Length

Three zones: (900mm, 36" in total)

  • Zone 1: 229mm  (9")
  • Zone 2: 457mm  (18.0")
  • Zone 3: 229 mm (9")

Constant Temperature Zone

  • If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC.
  • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1oC.

Temperature Accuracy

+/- 1oC

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

Vacuum Sensor & Display
Vacuum pressure gauges

  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).

Vacuum Pump

  • 120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace.
  • SS vacuum pipe & ball valve with KF25 adaptor guarantee a ^-2 torr vacuum

Tube Size and Flange

  • 125 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included.
  • Vacuum flanges with both valves and pressure gauge are included.

Sliding Rail

800mm long sliding rail is installed with one end flange to make loading & unload sample easy.

  • 2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal (see bottom left picture)
  • 5" Quartz tube can accommodate 4" quartz wafer boat without  holder (see bottom right picture)

Mobile Cart & Flow Meters

  • Gas mixing controls with three floating meters(range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gas to operate during heating treatment.( click picture below left to see detail specs)
  • Two mobile carts are included to support furnace and sliding rail and allow flange sliding on table
  • Optional: for precision gas control, you may choose digital mass flow Control system instaed of float-meter at extra cost ( click picture below to see details )

3 Channels Float-meter gas control       3 channels MFC gas control (optional)


1080 X 430 x 600mm

Net Weight

~70 kg

Shipping Dimensions

65x45x35" (x2 pallets)

Shipping Weight

540 lbs


One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).


  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified

Application Notes

Operation Instructions




Premier Solutions Pte Ltd / MTI Corporation - Three Zone Split Tube Furnace (5" Dia, up to 1200C) with Sliding Rail, 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Gauge - OTF-1200X-5-III-SF

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