Three Heating Zones Max. 1200°C Split Vertical Tube Furnace with 2" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-50-III-VT-UL

0.0/5 rating (0 votes)


Product Number: OTF-1200X-50-III-VT-UL


OTF-1200X-50-III-VT-UL is Three Heating Zone Split Vertical Tube Furnace with vacuum sealed 50 mm diameter quartz tube. Not only it can achieve faster sample heating and quenching in vacuum or gas flow, but also be used for PVD, CSS or CVD coating. Three precision temperature controllers provide 30 segments heating and cooling program with +/- 1°C accuracy independently. The vertical tube furnace is installed in a heavy duty mobile cart for easy moving.



Furnace Structure
  • Double layer steel structure with air cooling to keep case temperature <65°C
  • High purity fibrous alumina insulation with Special coating to ensure maximum energy saving
  • Foam ceramic blocks with alumina coating are included, which is hanged on top and bottom of flange to protect O-ring from damaged by heat radiation.
  • The wheel is installed on the split top cover.


4.8KW (30Amps circuit breaker is recommended)


AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

1200°C (<1 hr) each zone

Continuous Temperature

1100°C for each zone

Max. Heating Rate

<= 20°C/min.

Temperature Accuracy

+/- 1°C

Tube Size and Materials

  • One 1200mm length quartz tube is included
  • OD: 50 mm, ID. 44 mm
  • Foam ceramic blocks with alumina coating are included , which is hanged on top of flange to protec O-ring damaged by heat radiation
  • Upgrade note:
  • ( Processing tube can be replaced by O.D. 50 mm mullite tube at extra cost, then furnace can be used upto 1250°C)

Heating Zone Length

  • Top: 135 mm
  • Middle: 260 mm
  • Bottom: 135 mm
  • Total: 530 mm

Constant Temperature Zone

  • Constant temperature zone: 400 mm (+/-1°C) if three heating zones are at the same temperature

Temperature Controller

  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • RS485 Communication Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order a MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
Vacuum Sealing Flange

Vacuum Level

  • 10E-2 Torr by mechanical vacuum pump

  • 10E-5 Torr by molecular pump

  •  Leak rate < 5 mTorr / min.

Heating Element

1300°C Fe-Cr-Al Alloy doped by Mo


500mm(L) x 430mm(W) x 880mm(H) exclude mobile cart
700mm(L) x 700mm(W) x 1680mm(H) install with mobile cart

Net Weight

About 115 kg

Shipping Size

45"(L) x 45"(W) x 50''(H)

Shipping Weight

320 lbs


One year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.)

  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 

Application Note ( We may help you to build customized flange to meet your application at extra cost )

  • Customers may calibrate temperature before use to obtain accurate temperature inside tube furnace, please click here to learn how.
  • Please click picture below to learn how to quench sample in gas flow and vacuum
    • Approach#1: Traditional wire cut and free-falling  ( Fig. 1 & 2 )
    • Approach#2: Electromagnetic release and free-falling. (Fig 3 & 4 )
                     Fig. 1                Fig. 2                                Fig. 3                           Fig. 4 
  • The furnace ca be modified into a HPCVD ( hybrid physical-chemical vapor deposition ) furnace via DIY a sample susceptor ( click picture below-left to see how )
  • The furnace can be used for brazing of two flat < 1"diameter sample via top dead weight under vacuum at <1000° ( click picture below -right to see how )

Operation Instructions



Click here to learn more about the installation of a gas regulator.


  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure <0.2 bar / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gases should be limited to < 200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.




PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - Three Heating Zones Max. 1200°C Split Vertical Tube Furnace with 2" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-50-III-VT-UL

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818