Spin Coater Processes

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Description

Laurell Technologies - Processess Supported

The Laurell Technologies Spin Coater WS-650 series is typically employed for Solvent, Base or Acid-based processing; Coating, Etching, Developing, Rinsing-Drying and Cleaning. While all of these processes are supported, Laurell Technologies recommends single-use only, due to known material conflicts. For example, Photoresist and Developer (cross-contamination), and SC-1 &n SC-2 (HCl + NH4OH), creating NH4Cl, a hazardous inhalation risk. Many dispense options both manual and automatic are available.

Continued Process Development:

A spray coating technique is currently in the prototype stage, focusing on Laurell Technologies MEMS Customers. We believe there is a more straightforward and affordable approach for uniformly coating high-aspect-ratio features found in MEMS work. We are currently looking for a few partners to help with beta-testing the system

Laurell® is a registered trademark of Laurell Technologies Corporation

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