Single Zone Tube Furnace with 6" - 8.5" Quartz tube and Hinged Type Vacuum Flanges (1100 ºC , 24" heating zone) - GSL-1100X-XX-S-UL series

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Description

 

Part Number: GSL-1100X-XX-S-UL

GSL-1100X-XX-S-UL is a ready-to-pass UL/CSA (UL61010 or SPE1000 certification) furnace. It is single heating zone and adapts to various sizes of quartz tube (6" or 8.5" outside diameter). Heating temperature is up to 1100°C. The vacuum flanges with fittings are included. It is widely used for materials or chemical lab to sinter materials and anneal semiconductor wafers under vacuum or other gases condition. Furnace is controlled by an intellegent temperature controller with accuracy +/-1°C and 30 programmable segments.

 

SPECIFICATIONS

Model GSL-1100X-6-S-UL GSL-1100X-8.5-S-UL
Fused Quartz Tube Size Quartz Tube:
152 OD x 143 IDx 1300L mm (6" x 5.6" x 40")
Quartz Tube: 
216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L
)
Furnace Structure
  • Double layer steel casing.
  • Four cooling fans are buit inside to keep temperature of outside case < 60ºC
  • High purity alumina fibrous insulation for max energy saving.
  • Two foam ceramic thermal blocks are included, which must be place inside tube of two end to block heat radiation

                     

Input Voltage 208 - 230VAC Single phase
Power 8kW (50Amps Air Breaker is required)
Heating Element NiCrAl Resistance Wire
Working Temperature
  • Max. heating temperature: 110 0°C
  • Continuous working temperature: 400 -1050°C
  • Max. heating/cooling rate: 20°C/min
  • Typical temperature profile at 800°C (click picture below to see detail)
          
Heating Zone
  • Total heating zone length: 600mm (24'')
  • constant temperature zone: 200mm at the center (with +/-1°C)
Temperature Controller

                 

Vacuum & Fitting Ports
  • One pair of stainless steel vacuum seal flange with hinged type ( see picture below )
  • One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port and 1/4'' feedthrough. Vacuum pressure limit: depended on vacuum pump. (Usually 10-2 torr by mechanical pump).
  • Two air cooling fans to keep flange temperature beow 70°C
  • Water cooling flange is available upon request at extra cost
                             
Cooling Two 20mm air cooling fans help dissipate heat of the flange. 
Product Dimension 1000L x 680W x 920 H  mm
Net Weight 250Kg
Shipping Dimension 60" x 60" x 55"
Shipping Weight
  350Kg
Warranty One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Certificate
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details) 
           
Application Notes

                     Click here to learn the installation of a gas regulator
Warning:  
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa   ( or   0.12 MPa (absolute pressure).
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Never heat  furnace at positive pressure and close outlet valve condition. Once watch pressure gauge on furnace during heating , once pressure is over  3 PSI please open release valve immediately
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
 

 

CONSUMABLE PARTS LIST

No. Description Quantity Picture GSL-1100X-6-S-UL GSL-1100X-8.5-S-UL
01 Quartz tube 1 pc 152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L)
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
02 Quartz Thermal Block 1 pair

EQ-QTB-6

EQ-QTB-8
03 Hinged type vacuum sealing assembly 1 set EQ-FL-152 EQ-FL-213
04 O ring for flange cap 2 pcs EQ-SOR-152 EQ-SOR-213
05 O ring for inner flange 4 pcs EQ-SOR-168 EQ-SOR-230
06 KF-25 quick clamp 2 pcs EQ-KF-Clamp-D25
07 KF-25 right angle vacuum valve 1 pcs EQ-KF-Valve-D25
08 KF-25 Blank flange 2 pcs EQ-KF-BF

 

OPTIONAL ACCESSORIES

Part No. Description Quick Link

EQ-VAC-YTP550suite

KF-D25 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter)Also you may buy individually.

EQ-MTS02

Computerized temperature Control System
  High vacuum station (Mechanical pump + turbo molecular pump.)
  Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4channels selectable)
  Quartz Boats /curcible /container /sample holder
  Vacuum flange fittings and assembly

 

 

 

PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - Single Zone Tube Furnace with 6" - 8.5" Quartz tube and Hinged Type Vacuum Flanges (1100 ºC , 24" heating zone) - GSL-1100X-XX-S-UL series

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