Single Zone Dual Tube (100/80 mm) CVD Furnace with Sliding (Fast Heating/Cooling) & 4 Channel Gas & Vacuum System - OTF-1200X-4-C4LVS

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Description

Item Number: OTF-1200X-4-C4LV-Slide

OTF-1200X-4-C4LVS is a special dual tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:

  • Dual quartz tube:100mm dia. exterior tube and suspended by 80 mm dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction.
  • Vacuum sealed flanges for dual tube, which allow reactive gases to flow between two tubes ( 10mm space ) for reaction and inert gas flow inside tube for cooling.
  • 4 gas channels controlled by 4 separate digital MFCs
  • Vacuum pump is included with KF25 adapter and pipe for plug and play
  • Sliding rail is installed on the bottom of single zone furnace, which allows for fast heating or cooling by sliding furnace from one side to the other side

SPECIFICATIONS

Furnace Structure
  • High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Sliding flange assembly are made of stainless steel.
Power Power: 208-240VAC,  50/60Hz, single phase,  2.5KW ( 20A Breaker required)
Heating Temperature
  • Max. Temperature: 1100°C
  • Continuous Temperature: 1000°C
Heating Zone
Heating zone length: 440mm
Constant temperature heating zone length: 120 (±1°C) @400~1100°C
Heating & Cooling Rate
Max. heating and cooling rates depend on working temperature.  Please click on tables below to see the Max. heating & cooling rate varies at different temperature range.
( You shall calibrate temperature and heating cooling rate at your working condition before use )
click to enlarge click to enlarge
Heating plot                          Cooling plot
Fused Quartz Tubes
  • Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm )
  • Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm )
Vacuum Flanges Using dual tube for inducing CVD growth on metal foil (wrapped around interior tube surfuace):

1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and the space  between the outside tube and inside tube (this space is considered as reaction chamber).
1-2. Leave both ends of inside tube open for gas cooling.
Left flange (click to enlarge) Right flange (click to enlarge)

Ultimate vacuum pressure:   10^-2 torr (by mechanical pump)
10^-5 torr (by turbo molecular pump)
Water Cooling Function Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure best sealing at high temperature:
  • Water cooling flanges require >= 10L/M water flow.
  • You may use tap water as coolant, but we strongly suggest you to use a recirculating water chiller for environmental considerations. Please click thumb below to order the water chiller at extra cost.
Optional Parts (building up a single tube furnace) You can build up a 80mm dia. single tube reaction chamber by ordering extra sealing flanges and install them onto interior tube:

(click the picture to enlarge the picture)
Temperature Controller
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in over temperature alarm and protection allows for operation without attendant.
  • Optional:
    • The furnace may be operated by PC by installing a control module. Please order a MTS-02 control module at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems. For more information please click here.

Mass Flow Meters & Gas Mixing Station
  • Four precision mass flow controller ( MFC)  with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
  • 4 Gas channels (contact MTI sales if need more)
    • MFC 1: Control range from 0~100 sccm
    • MFC 2: Control range from 0~200 sccm
    • MFC 3: Control range from 0~200 sccm
    • MFC 4: Control range from 0~500 sccm
  • Flowing rate accuracy: ±1% FS
  • Gas inlet and outlet: 1/4" swagelok tube connector
  • One 80mL gas mixing tank is installed in bottom case
  • Each gas channle has a SS needle valve for easy on/off
  • The flow rate is adjustable from the MFC panel
Vacuum Pump
Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System is installed inside the vacuum station. vacuum pressure 10^-2 Torr.
KFD25 adapter and stainless steel pipe are connected between pump and tube flange with a right-angle vacuum valve .

Optional: You may choose low vacuum dry vacuum pump for zero contamination (click picture on left for details):
Dimensions
  • Furnace: 550 x 380 x 520mm
  • Bottom Mobile case x 2: 600x600x597mm
Shipping
  • Shipping Weight: ~800 lb
  • Shiping by freight with three pallets
  • Crating fee will be applied
Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). 
Compliance
  • Components:   Temperature controller is Met certified.   
  • Furnce:          CE certified
  • CSA certificate is available upon request at extra cost
Application Notes
Operation Instructions

(Operation and Installation Video) (Furnace-Sliding Test Demo)

 

 

 

Premier Solutions Pte Ltd / MTI Corporations - Single Zone Dual Tube (100/80 mm) CVD Furnace with Sliding (Fast Heating/Cooling) & 4 Channel Gas & Vacuum System - OTF-1200X-4-C4LVS

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