RTP Tube Furnace with 4" Quartz Tube & and Three Channels Gas Flowmeter and Vacuum Pump (up to 10-3 torr at 1100C) - EQ-RTP-1000-LV3C

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Description

Item Number: EQ-RTP-1000-LV3C

EQ-RTP1000-LV3C is a 4" I.D RTP (Rapid Thermal Processing) tube furnace with three flow meters and a machanical pump capable of producing up to 10-3 torr vacuum. It is designed for annealing semiconductor wafers, solar cells or any other samples up to 3" in diameter. EQ-RTP1000-LV3C is heated by 10KW halogen lamps with a max. heating rate of 120oC/second. 50 segment precision temperature controller with +/-1ÂșC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. Three gas flow-meters and a vacuum pump are installed inside the mobile cart with connection to the RTP furnace.

Specifications:

Furnace Structure
  • Compact 4

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