Rectangular Valve - Door

Applications

• Plasma Etch, CVD, Sputter Deposition
• Manufacturing of solar panels
• Semiconductor processing
• LCD/flat panel processes
• All other cluster vacuum systems

Features

• Semi standard application (Semi E21-94, Semi E24-92, Semi E21.1-1296)
• Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
• Particle and vibration free
• Realization of exact L-motion
• Easy maintenance

Options

• Custom sizes available
• Various o-ring compounds (Kalrez®, Chemraz®, etc.)
• Double gate seal door valve available