RDC 48 - 48" Radial Distribution Center

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Description

 

Applications

  • The Kurt J. Lesker RDC 48 facilitates multi-chamber in-vacuum substrate transfer ideal for cluster tool environments.
  • UHV compatible, the Kurt J. Lesker RDC 48 is suited for university, industrial, and government R&D labs

Features

  • 48" diameter stainless steel transfer vessel
  • Adjustable height aluminium extruded framework
  • Turbo-molecular pumping
  • Accommodates up to 8" (200mm) diameter substrates
  • Linear rack and pinion transporter, controlled via rotary drive
  • Up to (8) flanged transfer ports

Options:

  • Special sizes and port orientations available
  • MESC rectangular ports
  • Manually operated DC motorization of rack and pinion
  • Ion pumping

 

Lesker RDC 48 - 48" Radial Distribution Center

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