Radial Distribution Center (RDC)

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Description

     

Lesker Radial Distribution Center (RDC)

 

The Kurt J. Lesker Radial Distribution Center (RDC) facilitates multichamber in-vacuum substrate transfer ideal for cluster tool environments. The RDC is typically mounted at the center of a series of chambers, acting as a central hub from which the sample transfer occurs. A linear rack-and-pinion transporter, controlled by a rotary drive, moves and rotates the sample about its center axis between chambers through the shared ports.

Features

  • 36"I.D. stainless steel vessel
  • Up to eight 8"CF transfer ports
  • 8"CF pumping port
  • 2-3/4"CF process ports and/or viewports
  • Aluminum extruded frame

Custom sizes and port orientations available. Contact us for more information.

 

 

Lesker Radial Distribution Center (RDC)

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