Quadratic Distribution Vessel - QDR 450

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Description

     

 

Applications

  • The Lesker QDV 450 facilitates multi-chamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
  • The Lesker QDV 450 can also function as an entry lock

Features

  • All aluminium vessel construction
  • Stand alone framework
  • Turbo-molecular pumping
  • Accommodates up to 6" (150 mm) diameter substrates
  • Motorized rotary/linear substrate slide mechanism with precision guide way system
  • MESC-SEMI rectangular ports
  • User select semi-automation

Options:

  • External dedicated load lock chamber
  • External single or multi wafer storage

 

Lesker Quadratic Distribution Vessel - QDR 450

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