QDV 450R - Robotic Substrate Distribution Vessel

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Description

     

 

Applications

  • The Kurt J. Lesker QDV 450 facilitates multichamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
  • The Kurt J. Lesker QDV 450 is fully automated with recipe control and sensing features for acurate and continuous transfer.

Features

  • All aluminum vessel construction
  • Stand alone framework
  • Turbomolecular pumping
  • Accommodates up to 6" (150 mm) diameter substrates
  • Precision vacuum robot with 3-axis movement
  • MESC-SEMI rectangular ports
  • Fully automated with recipe control

Options:

  • External dedicated load lock chamber
  • External single or multi wafer storage

 

Lesker QDV 450R - Robotic Substrate Distribution Vessel

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