PVD 18

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Description

 

New economical design geared toward R&D applications for the budget-conscious.

Features

  • 18" Wide x 18" Deep x 20" High cylindrical chamber
  • Available with up to 5 source ports (standard)
  • Available with up to 5 TORUS® Magnetron Sputtering Sources
  • Available with multipocket electron beam evaporation source
  • Available with multiple thermal evaporation sources
  • Accommodates substrates up to 4"

Optional Configurations

  • Pre-engineered solution for configuring standard Kurt J. Lesker system platforms in cluster tool arrangement
  • Standard QDV 450 vessel will accommodate 3 process chambers plus load lock
  • Can be configured with up to 6 connection ports

 

Lesker PVD 18

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