Protection Valve System

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Description

New from Kurt J. Lesker Company-our patented Protection Vacuum Gate Valve's fast action (<0.3 secs to close) protects products that are "in-process" in the event of a vacuum pump failure. This bellows sealed, pneumatic actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display.

The internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation-leading to long life under adverse process conditions.

 

Applications

For vacuum pump or chamber isolation in demanding processes:

  • Plasma etching, cleaning, and desmearing
  • All CVD processes (including MO, PE, HDP, LP, and AP)
  • Sputter deposition and e-beam/thermal evaporation
  • Nanotechnology processes with high particulate levels
  • Thin film photovoltaic panels

 

Features

  • Significantly reduces down time by protecting your system from backstreaming process in the event of vacuum pump failure
  • Ideally suited for high particulate generating applications
  • Fast pneumatic actuation-close in <0.3 seconds
  • Long cycle life under adverse process conditions
  • Low shock/motion during open/close cycling
  • Local/remote control with status LCD display
  • 1, 2, 3, or 4 channel control options

 

 

 

 

 

Lesker Protection Valve System

 

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