Pneumatic Viewport Shutters

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Description

 

Lesker - Pneumatic Viewport Shutters

 

 

 

Kurt J. Lesker Viewport Shutters Features:

  • Prevent deposition materials from depositing on and ruining viewports
  • Shutters are opened in safe conditions, closed while deposition occurs
  • Operate to base pressures below 10-9 Torr
  • Bakeable to 250°C

Pneumatic Viewport Shutters Feature:

  • Solenoid-operated spool valve switches compressed gas between actuator ports (energized to sweep, de-energized to return [not Included])
  • Pneumatic actuator has adjustable stops for sweep adjustment
  • Flow regulators are installed at each port to regulate air pressure
  • Actuator assembly is easily removable with two cap screws for bakeout
  • 98 psi maximum input air pressure

NOTE:

  • Kurt J. Lesker / Premier Solutions strongly recommend shutters for evaporation and sputtering systems in which material may deposit on the viewport viewing area.
  • The "E" dimension is applicable to only the pneumatic viewport shutters.

Dimensional Drawings

 

 

Premium Solutions Pte Ltd / Lesker Pneumatic Viewport Shutters

 

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