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Features static water-to-vacuum seals eliminating risk of water leakage into the vacuum system due to failing rotary seals.


  • Small beam spot regardless of position in pocket
  • Low inductance x- and y-coils with dynamic defocusing capability
  • No dynamic water-vacuum interface
  • Integrated coaxial water feedthrough for health and source body cooling
  • Extended filament lifetime
  • Reproducible and quick filament fixture
  • Hearth positioning using optical encoder
  • Plug-in connector for magnet leads


  • Homogeneous material depletion
  • Stable beam sweep at high beam deflection frequencies
  • Eliminates water leakage into vacuum system
  • No additional water feedthrough required
  • Reduced maintenance and down-time
  • Enhanced run-to-run repeatability
  • Built-in hearth rotation with high positioning accuracy
  • Non-interchangeable connections

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