MKS 627C e-Series Capacitance Manometers

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Lesker MKS 627C e-Series Capacitance Manometers


The Kurt J. Lesker New Ethernet-enabled manometers, temperature controlled to 45° C (627C) or 100° C (628C).

For over 10 years, the 600 Series MKS Baratron® Capacitance Manometers have led the industry in long-term performance, accuracy, reliability, and worldwide installed base. Their new Ethernet-enabled e-Baratron 627C and 628C now adds the ability to network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system.

Like other MKS Ethernet-equipped products, the 600C Series manometer includes embedded internet browser software that enables it to communicate with any Windows® based PC. Because the Ethernet port operates in parallel to the standard analog communications, the device can be diagnosed on a real-time basis during processing—a huge benefit for users who perform their own system analysis and troubleshooting. Even for users who do not use Ethernet networking, the Types 627C and 628C also have external LEDs to give a fast intuitive guide to the device's status.


  • Industry-leading accuracy and repeatability
  • Standard product includes both analog and Ethernet communications for use in existing and latest generation of networked process tools
  • Ethernet communications are real-time and can be run in parallel with analog communications, enabling in-situ diagnostics of device and process—no cable disconnection required
  • Embedded Internet web browser communicates with any Windows based PC
  • Standard intuitive Graphical User Interface (GUI) with a complete suite of diagnostic routines that can be used for the device or the process
  • Full-scale pressure ranges from 1,000 Torr to 0.02 Torr
  • Easy-to-understand external indicators for immediate device status information
  • Operating temperatures of 45° C or 100° C for use in difficult semiconductor, display manufacturing, and biopharmaceutical processes
  • Pin-to-pin compatible with other heated analog Baratron capacitance manometers and some competitive products
  • CE compliant, and tested to applicable provisions of SEMI S2-93 safety guidelines


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