Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge - OTF-1200X-S50-2F

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Description

Product Number: OTF-1200X-S50-2F

 

OTF-1200X-S50-2F Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C.  A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter).  The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe.  The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy.  This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.  In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge.

 

SPECIFICATIONS

Furnace Structure Heavy duty steel casing
Energy efficient Al2O3 fibrous thermal insulation
Power Consumption 1.75KW
Input Voltage AC110V (For using under AC 220V, please contact our tech. support team)
Temperature 1200 Max. for < 1hr
1100 for continuously heating
Heating rate <= 10C/min
Processing Tube Quartz tube  50 x 43 x 450mm (O.D x I.D x Length)
Heating Zone Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
The following picture-left shows the temp. distribution across the heating zone, please click to enlarge.
Two thermal blocks are included and must be placed inside tue as shown picture below-right
   
Temperature Controller
  • PID automatic control and auto-tune function.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
     
Heating Elements Fe-Cr-Al Alloy doped by Mo
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
  • Accurate pressure reading with any mixed gases
Two Channel Gas Mixing Station
  • Two floating flow meters 16 to 100 mL/min flow rate range
  • Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
  • Vacuum needle valves are made of SS304
  • Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
  • Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7")
  • Net Weight: 14 lbs
  • No power required
  • Click the pictures below to see more details

                   (optional Constant temperature control module )

Oxygen Monitoring (Optional) An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
         
Vacuum Flanges and Fittings Structure (click on pictures to enlarge)
            Left side        Right side                       
Vacuum fittings in standard package:
Vacuum Pump
  • Model: EQ-2TW-4C two step high speed vacuum pump
  • Voltage: The voltage of pump will be the same as the tube furnace.
  • Pumping rate: 8CFM, 226L/min (please click here to convert metric to English unit )
  • Vaccum level in the furnace system can reach 5x10-2 torr
  • Power: 3/4 HP (500W)
  • Oil volume: 1000ml
Net Weight 100 lbs
Product Dimensions
  • Furnace: 340 x 300 x 400 mm
  • Vacuum Pump: 440 x 160 x 300 mm
  • Gas Station: 340 x 300 x 180 mm
Shipping Weight 200lbs
Shipping Dimensions 45x45x35"
Warranty One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). 
Compliance
  • Furnace:
    • CE/UL/CSA Certifcate
    • Please select the certificate in option bar:
      • CE Certificate & UL/CSA ready to pass UL/CSA certifcate at extra cost
      • UL certircate -  UL apprval (UL 61010)
                      
  • Vacuum Pump:    CE Certified
Application Notes

Click here to learn the installation of a gas regulator
  • Please click here to see our typical temperature profile calibration result at various temperature.
  • Warning: Tube furnaces with quartz tube are designed for use with vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
Operation Instructions         

 

 

 

PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge - OTF-1200X-S50-2F

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