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LUMINOS™— Multi-chamber thin film deposition and analysis manual cluster tool system for R&D applications requiring in-vacuum substrate transfer between chambers.
Penn State University uses Lesker LUMINOS™ to deposit multi-layered PVD and CVD thin films.
Typical Applications
Deposition Techniques Available
Process Options
Features
Optional
For over 20 years, Kurt J. Lesker has designed, manufactured, assembled, programmed, and tested hundreds of thin film deposition systems for both research and production applications. Kurt J. Lesker four clean assembly areas, located at their US and UK facilities, provide the necessary environment for system assembly and testing. All seals, welds, flanges, and chambers are helium leak checked and inspected to ensure vacuum integrity prior to system assembly. These components are then professionally assembled by Kurt J. Lesker technicians using protective wear to prevent contamination. Kurt J. Lesker on-site fabrication shops offer immediate support for any necessary modifications during assembly. Functional testing of the completed systems to standard procedures and customer specifications ensures reliability and customer satisfaction. Kurt J. Lesker offers on-site system start-up and customer training for any of their systems to get your process up and running—quickly and efficiently.
Lesker LUMINOS - Manual Cluster Tool