KJLC AT-Series

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Description

 

Lesker Complete packages ready to provide reliable plasma generation and RF biasing to meet your process requirements.

Features:

  • CE marked compliance
  • Automatic Gain Control
  • Programmable Presets
  • DC Probe Standard
  • High Voltage Variable Capacitors
  • Displays Forward Power, Reflected Power, and DC Bias
  • Analog or Serial Interface
  • Low Loss Design
  • Single Point System Integration

NOTE: A DC Voltage probe is included within the Lesker AT Series Matching Networks. The probe provides a means to measure the developed DC Voltage within the chamber. The DC Voltage probe’s output signal is proportional to the developed DC within the chamber.

 

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