FSM EOT

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Description

Electrical Measurement Techniques - fully automated product wafer monitor for oxide quality and gate oxide stack evaluation

This tool has the ability to simultaneously measure CV characteristics such as effective oxide thickness (EOT), Vfb, Qeff, Dit and a full range of IV information. FSM has a complete line of Fully Automated or Bench top metrology tools available

Premier Solutions Pte Ltd / FSM EOT (Electrical Measurement)

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