Fluidized Bed Vertical Tube Furnace with 1'' O.D Quartz Tube and Flange for Powder CVD - OTF-1200X-S-FB-UL

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Part Number: OTF-1200X-S-FB


OTF-1200X-S-FB is an UL/CSA ready to pass and a Fluidized Bed Vertical Furnace with 1'' O.D Quartz Tube (2'' O.D enlarged central area) for powder CVD applications. It consists a vertical-positioned cylindrical heating chamber which surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. Its filter is a porous (15~40 microns) quartz frit that allows the controlled gas flow pass through and float the particles on a cushion of the gas stream where the interaction between the solid and gaseous materials take place.


Fluidized Zone

  • Provides uniform distribution of the gas blast over the entire cross section of the tube chamber
  • Solid particles are suspended by an upward gas flowing
  • Excellent heat transfer and coating to every single suspended particles 
  • Processed materials can be discharged from the top side of the tube after the cap is been taken off

Note: The gas is passed upward through the fluidized bed at a high enough velocity to lift the particles. However, particles may be swept away from the tube chamber entirely if the velocity was set too high. Depends on the particle size, you may want to adjust the gas-in pressure and flow rate until particles are lifted and move turbulently inside of the tube.

Quartz Frit
Frits with forced convection design can trap the particles within the central heating area
  • Frit: 15~40 microns porous, 22mm O.D x 4mm thick
Furnace Casing
  • Double layer steel structure with air cooling
  • Split door design for easy installation of tube
  • High purity Al2O3 fibrous insulation designed for maximum energy saving




AC 110V or 220V Single Phase, 50/60 Hz 

Max. Temperature


Continuous Temperature


Max. Heating Rate

<= 20oC /min

Tube Size and Materials

  • One quartz tube is included. Main tube with bottom frit and enlarged space for particles processing
  • Two Ends: 25mm O.D, 22mm I.D; Central: 50mm O.D, 44mm I.D, for detailed size, please refer to the picture in below.
  • Central enlarged area ensure the high aerodynamic performance

Sealing Flanges

  • Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas 
  • Top Flange: Special designed 1'' top flange with back-streaming secondary (precursor) gas inlet and exhaust, please click the picture in below for detail

Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

Heating Zone Length

200mm  (single zone)

Constant Heating Zone 100mm (+/-2oC)

Temperature Controller

  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
Heating Elements Fe-Cr-Al Alloy doped by Mo
Fitting Ports 1/4'' Tube Fittings were installed on both sides of the flange for standard connection to the gas supplier


340mm×300mm×1000mm ( W x L x H)

Net Weight

~20 Kg (excluding mobile cart)

Shipping Weight

200 lbs


  • One year limited warranty (Consumable parts such as heating elements, processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.)


  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. 


Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tube is designed for using under low positive pressure < 0.2 bar / 3 psi / 0.02 MPa
  • The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 

Operation Instructions




PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - Fluidized Bed Vertical Tube Furnace with 1'' O.D Quartz Tube and Flange for Powder CVD - OTF-1200X-S-FB-UL

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