F60-t System

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Filmetrics Automated Thickess Mapping for Production Environments            


The Filmetrics F60-t family maps film thickness and index just like Filmetrics F50 products, but it also includes a number of features intended specifically for production environments.  These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling.


The different Filmetrics F60-t instruments are distinguished primarily by wavelength range.  Generally shorter wavelengths (e.g. F60-t-UV) are required for thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.  Production-ready tabletop mapping system includes on-board reference, notch finding, interlocked cover, and more.



Each Filmetrics F60-t model includes everything listed below.  Note that a sample chuck must be ordered separately:


• Integrated Stage/Spectrometer/Light Source Unit (chuck not included)


• Industrial computer with pre-installed FILMeasure 5.0 software


• 4”, 6” and 200mm Reference Wafers


• TS-Si02-4-7200 Thickness standard


• Vacuum Pump


• Hardcopy of Operator’s Manual


• Connecting cables


• FILMeasure standalone software (for remote data analysis)


• Spare lamp


• Tweezers


Common Optional Accessories


• F60 Chucks - 200mm, 300mm


• NIST - traceable thickness standard


In addition, each Filmetrics F60-t includes these Filmetrics advantages:


• Library with over 130 materials


• Free software updates






Premier Solutions Pte Ltd / Filmetrics F60-t System thin film measurement / thickness measurement


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