F60-t System

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Description

Filmetrics Automated Thickess Mapping for Production Environments            

 

The Filmetrics F60-t family maps film thickness and index just like Filmetrics F50 products, but it also includes a number of features intended specifically for production environments.  These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling.

 

The different Filmetrics F60-t instruments are distinguished primarily by wavelength range.  Generally shorter wavelengths (e.g. F60-t-UV) are required for thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.  Production-ready tabletop mapping system includes on-board reference, notch finding, interlocked cover, and more.

 

 

Each Filmetrics F60-t model includes everything listed below.  Note that a sample chuck must be ordered separately:

 

• Integrated Stage/Spectrometer/Light Source Unit (chuck not included)

 

• Industrial computer with pre-installed FILMeasure 5.0 software

 

• 4”, 6” and 200mm Reference Wafers

 

• TS-Si02-4-7200 Thickness standard

 

• Vacuum Pump

 

• Hardcopy of Operator’s Manual

 

• Connecting cables

 

• FILMeasure standalone software (for remote data analysis)

 

• Spare lamp

 

• Tweezers

 

Common Optional Accessories

 

• F60 Chucks - 200mm, 300mm

 

• NIST - traceable thickness standard

 

In addition, each Filmetrics F60-t includes these Filmetrics advantages:

 

• Library with over 130 materials

 

• Free software updates

 

 

 

 

 

Premier Solutions Pte Ltd / Filmetrics F60-t System thin film measurement / thickness measurement

 

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