Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with Three Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge - OTF-1200X-80-II-F3LV

0.0/5 rating (0 votes)

Description

Item Number: OTF-1200X-80-II-F3LV

 

OTF-1200X-80-II-F3LV is a CE certified spiltable dual zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3  types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS

Furnace Construction
  • Double layer steel casing with air cooling.
  • Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz

Maximum Temperature 1200  oC
Continuous Working Temperature 1100  oC
Heating Zone Length Two Zones:  200 mm (8") for each zone and total 400 mm heating zone length
Constant Temperature Zone
  • If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long  with a temperature discrepancy of +/- 1oC.
  • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1oC.
Max. Heating Rate <= 20  oC /min
Temperature Accuracy +/- 1oC
Heating Elements Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

  • Two precision temperature controllers to control two zones separately.
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing two control modules. Please order the MTS-02 control modules at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

Tube Size and Materials

Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm

Digital Vacuum Gauge 
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Sealing Flanges
  • Two stainless steel flanges with KF25 port, vacuum gauge and valves included.
  • Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). The pressure can reach 10^-5 torr using mechanical + moleculer pumps.
  • Leaking rate is < 5 m-torr/min and stable vacuum pressure after 24 hours is < 2 torr.
  • Click the picture below to get details of both charts and data measured by CE cetified vacuum meter:

Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.

Vacuum pump

120 L/m  Rotary Vane Vacuum Pump with Oil Trap (220V single phase) and stainless steel hose tube are included for connecting to tube furnace. Max. acheivable vacuum pressure is 10^-2 torr.

Gas Mixing Control Station

New Version front panel
1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3) Compact direct read flow meter, 25-250 cc/min.
  • Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
Valves Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately

Dimensions

  • Furnace: 550 x 380 x 520 mm
  • Bottom Mobile case: 600 x 600 x 597 mm

Net Weight

~ 60 kg

Shipping Weight

600 lbs

Shipping Dimensions

Three Pallets: 45"x45"x35" each

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance

CE Certified

Application Notes

Operation Instructions

 

 

 

Premier Solutions Pte Ltd / MTI Corporation - Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with Three Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge - OTF-1200X-80-II-F3LV

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818