D-Shaped Chamber Sub-System

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Based on Lesker successful PVD 75 System platform, this open design system can be tailored to fit your application


  • 304 Stainless Steel D-Shaped Chamber, available in 14" and 18" diameters
  • Aluminium Door with Large Viewport
  • Turbo-molecular Pumping
  • Open Aluminium Framework


  • Manual Touch Screen or Computer Controlled Automation
  • Cryogenic Pumping
  • Accepts Many Standard Component and Deposition Modules


Lesker D-Shaped Chamber Sub-System

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