CMT-SR3000

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Description

4 Point Probe System / Sheet resistance system

 

The CMT-SR3000 is a measurement system for Sheet Resistance and Resistivity of a plain rectangle sample such as LCD, ITO, Solar cell, Fuel cell etc.  And it is designed to work for remote functioning to meet automation such as automatic sample loading.  This system is designed for easy operation by a personal computer with exclusive software, and this software has function for various data analyses, mapping and etc.

 

 

 

 

1. Features  
XYZ-axis fully automatic system    
Automatic range selection    
Perfect remote control by operating software.    
Data analysis (2D, 3D mapping / Diameter scan / Trend chart, etc.)
Anti Static System    
Glass centering nob    
Glass unload positioning    
2. Configuration    
  The system consists of the following components.    
4-point probe head unit    
Bridge type XYZ-axis robot    
Sample stage for flat panel    
LED for process signal    
Remote control communication port    
Power switch    
Operating analysis software    
Standard accessories    
  - Power cable 
- Remote control communication cable 
- Operating & service manual
   
3. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe(input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ±0.5 % (VLSI standard wafer, when 23°C)    
4-point probe (Jandel Eng.)    
  - Pin spacing : 25 mils ∼ 50 mils by 5mil increments.
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 micron (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm
Operating software    
  - Measurement condition creation : Sample size, measure point interval, test mode, etc. 
- Save & load : Data, Sample type, measure point, etc.
- Data analysis : 2D, 3D mapping, Data map, etc.
- Data & mapping printout
Measurement mode (S/W)    
  - Auto measurement : Point interval designation by user 
- Quick measurement : 9, 13, 25 pattern quick mode
- Point measurement : Appointment on wafer by mouse
- Manual measurement : Appointment on wafer by arrow key
4. Specimen    
  - Rectangle type sample size : Customer size    
5. Measuring time    
  - Approx. 3 ± 1 sec/point    
6. Software (Windows 98/XP/NT(Service Pack 4.0))
Operating personal computer : IBM PC/AT Compatible Pentium
Serial communication (RS232)
7. Utility requirement    
Power requirements    
  - Line voltage : AC 110V or 220V ±10% 
- Electric power : 100 W, 500 mA 
- Line frequency : 50 Hz 
   
Air requirements    
  - Air 1 Line : About 1 MPa (kgf/cm2)    
System table    
8. Outside Dimensions    
SR3000S (370X470) : 650mm(W) × 900mm(D) × 350mm(H)
SR3000M (550X650) : 700mm(W) × 950mm(D) × 350mm(H)
SR3000L (600X720) : 800mm(W) ×1050mm(D) × 350mm(H)
SR3000C : Customer size
9. Operating environment    
Temperature range : 23°± 1°C    
Relative humidity : 30 % ∼ 70 %    
  - Avoid placing the system near a source of RFI, vibration and sources of gas.
- Avoid large changes in temperature.

 

 

 

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